GPT

FILTERS AND PURIFIERS FOR MACHINES, NAMELY, FILTERS AND PURIFIERS FOR REMOVING CONTAMINANTS FROM GASES USED IN THE SEMICONDUCTOR INDUSTRY; IC HANDLERS, NAMELY MACHINES FOR PROCESSING INTEGRATED CIRCUITS; INDUSTRIAL CHEMICAL REACTORS; INDUSTRIAL CLEANING MACHINERY; INDUSTRIAL PHOTOCHEMICAL REACTORS; PLASMA ETCHING MACHINES; SEMICONDUCTOR MANUFACTURING MACHINES; SEMICONDUCTOR SUBSTRATES MANUFACTURING MACHINES; SEMICONDUCTOR WAFER PROCESSING MACHINES; SEMICONDUCTOR WAFER PROCESSING EQUIPMENT; SEPARATING MACHINES FOR CHEMICAL PROCESSING; SEMICONDUCTOR PROCESSING UNITS FOR ETCHING AND CHEMICAL PROCESSING OF SEMICONDUCTOR WAFERS, SUBSTRATES, AND MAGNETIC DISKS; MACHINES FOR CLEANING AND DRYING CARRIERS AND CONTAINERS USED FOR HOLDING AND TRANSPORTING SEMICONDUCTOR WAFERS AND SIMILAR FLAT SUBSTRATES; MACHINES AND APPARATUS FOR ETCHING, CLEANING, POLISHING, ROUGHENING AND DRYING OF SEMI-FINISHED PRODUCTS FOR SEMICONDUCTORS; APPARATUS FOR THE MANUFACTURE OF SEMICONDUCTORS AND MICROELECTRONIC SEMICONDUCTOR PRODUCTS; APPARATUS FOR PROCESSING SEMI-FINISHED PRODUCTS FOR SEMICONDUCTORS AND SILICON WAFERS; INDUSTRIAL PRODUCTION MACHINES FOR TREATING AND PROCESSING SEMICONDUCTOR WAFERS, SEMICONDUCTOR SUBSTRATES, FLAT PANEL DISPLAYS AND DATA DISKS, NAMELY AUTOMATED MULTI-STATION FLUID PROCESSING MACHINE SYSTEMS FOR THE MANUFACTURE OF SEMICONDUCTOR WAFERS, SEMICONDUCTOR SUBSTRATES, FLAT PANEL DISPLAYS, AND DATA DISKS COMPRISING WAFER HANDLING MACHINES, WAFER CHEMICAL PROCESSING MACHINES AND RELATED CONTROLLERS SOLD AS A UNIT