88913864
May 13, 2020
Semiconductor wafer processing equipment and semiconductor wafer processing equipment components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers, and monitoring equipment, all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
MachineryProviding information in the field of the custom manufacture of semiconductor wafers, namely, providing process recipes used in connection with semiconductor wafer processing equipment, consisting of sets of parameters to form, create, remove, treat, measure, or modify a single layer or material, or a sequence of layers or materials
Treatment of Materials