GENUS

Semiconductor manufacturing machines and structural parts thereof; Semiconductor wafer processing equipment; Semiconductor substrates manufacturing machines; semiconductor manufacturing machines, namely film deposition and removal units, employed by the semiconductor industry in the fabrication of integrated circuits and the like; coating machines for depositing of ultra-thin films, employed by the data storage, micro-electromechanical, and opto-electronic industry in the fabrication of data-storage, micro-electromechanical and opto-electronic components