74395957
May 28, 1993
manufacturing machines for thin film processing in the production of thin film transistors and other electronic products, and parts thereof; and manufacturing machines for liquid crystal displays for use in electronic products, and parts thereof
Machinerysemiconductor wafer processing equipment and components; namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, supporting frames therefor, and parts therefor
Electrical and Scientific Apparatus