Mark Identification

FSI

Serial Number

73760704

Filing Date

Oct 31, 1988

Registration Date

Jan 15, 1991

Trademark by

TEL MANUFACTURING AND ENGINEERING OF AMERICA INC.

Classification Information

ELECTRONICALLY AND COMPUTER CONTROLLED MACHINES, NAMELY, LIQUID AND GAS PHASE SPRAY MACHINES FOR PROCESSING SEMICONDUCTOR WAFERS; SEMICONDUCTOR WAFER CLEANING MACHINE USING ULTRASONIC FREQUENCY PRESSURE WAVES IN A LIQUID BATH; DRYING MACHINE FOR SEMICONDUCTR WAFERS AND SIMILAR DISCS, SUBSTRATES AND PANELS; BULK LIQUID CHEMICAL METERING AND DELIVERY APPARATUS; PHOTOLITHOGRAPHY APPARATUS FOR USE WITH SEMIDCONDUCTOR WAFERS

Electrical and Scientific Apparatus