73760704
Oct 31, 1988
Jan 15, 1991
ELECTRONICALLY AND COMPUTER CONTROLLED MACHINES, NAMELY, LIQUID AND GAS PHASE SPRAY MACHINES FOR PROCESSING SEMICONDUCTOR WAFERS; SEMICONDUCTOR WAFER CLEANING MACHINE USING ULTRASONIC FREQUENCY PRESSURE WAVES IN A LIQUID BATH; DRYING MACHINE FOR SEMICONDUCTR WAFERS AND SIMILAR DISCS, SUBSTRATES AND PANELS; BULK LIQUID CHEMICAL METERING AND DELIVERY APPARATUS; PHOTOLITHOGRAPHY APPARATUS FOR USE WITH SEMIDCONDUCTOR WAFERS
Electrical and Scientific Apparatus