FORTH-RITE

electronic measurement device which measures radio frequencies, converts said measurements to digital information, for use in process control in the fabrication of semiconductor devices; Computer controlled electronic measurement device which measures radio frequencies, converts said measurements to digital information, and dynamically controls the radio frequency power source, for use in process control in the fabrication of semiconductor devices; and Computer controlled electronic measurement device coupled with a computer controlled low impedance radio frequency load for the testing of radio frequency power delivery networks