FLUCTO-CMP

Semiconductor polishing activation equipment for use with a chemical-mechanical polisher (CMP) tool, namely, a light source and an acoustic wave source sold as an integral component of chemical mechanical polishing (CMP) machines; semiconductor polishing activation equipment for use with a chemical-mechanical polisher (CMP) tool, namely, a slurry injector machine that features an acoustic wave source, a light source, or an acoustic wave and a light source that bombards the slurry prior to leaving the injector to modify the slurry for improved cleaning of a wafer