FLOWFLANGE

GAS DISTRIBUTION SYSTEM COMPRISED OF SYSTEM DEPENDENT VACUUM COMPONENTS AND OTHER MACHINED COMPONENTS, NAMELY, SWAGELOCK FITTINGS, VIEWPORTS, GASKETS, INJECTOR PLATES, SCREENS, ADJUSTABLE VIEWPORT TUBES, SCREEN AND VIEWPORT SPACERS, INJECTOR RINGS, AND WELDMENT FLANGES, SOLD AS A UNIT, FOR PRODUCING COMPOUND SEMICONDUCTORS