85358819
Jun 28, 2011
Feb 14, 2012
An optical metrology inspection system comprised of a light source, one or more cameras and sensors in communication with computer software and hardware; Electro-optical instruments for use in inspection and measurement of industrial components; Optical inspection apparatus; Optical inspection apparatus for industrial use; Optical inspection apparatus for inspection of semiconductor materials, namely, semiconductor wafers, reticles, and photomasks
Electrical and Scientific Apparatus