FIBER SCALE

Linear encoders; encoders; distance measuring apparatus and instruments; measuring apparatus and instruments for use in detecting displacement and controlling position of machinery, namely, semiconductor/LCD steppers, semiconductor/LCD scanners, electron beam lithography system comprised of electron tubes and electron multipliers for use in producing semiconductors; measuring and control devices, namely, linear encoders and encoders, electronic controllers and probes for testing semiconductors for use in measuring displacement and controlling position of machine tools