FEI BEAM TECHNOLOGY

HIGH BRIGHTNESS, SUBMICRON ION AND ELECTRON BEAM COLUMNS USING FIELD EMISSION TECHNOLOGY; NAMELY, FOCUSED ION BEAM COLUMNS FOR ION LITHOGRAPHY, ION BEAM MILLING, SECONDARY ION MASS SPECTROSCOPY, FOCUSED ELECTRON BEAM COLUMNS FOR ELECTRON BEAM LITHOGRAPHY, AND ELECTRON BEAM MICROSCOPY; SINGLE CRYSTAL SOURCE MATERIALS; NAMELY, REFRACTORY METALS, LaB6 MINI-VOGEL MOUNT CATHODES, CeB6 MINI-VOGEL MOUNT CATHODES, WEHNELT REBUILDING SERVICE, COLD FIELD EMITTERS, SCHOTTKY EMITTERS, AND LIQUID METAL ION SOURCES