EXTRACTION

Apparatus and instruments, namely, gas filtering apparatus and instruments, gas filters, gas monitoring apparatus and instruments, and gas control apparatus and instruments, for use in the gas, semiconductor, electronics, photolithography, integrated optical systems industries, and parts, fittings and components for the aforesaid goods; and computer software for the design, testing, fabrication, or control of gas filtering apparatus and instruments, gas sampling devices, gas monitoring apparatus and instruments, and gas control apparatus and instruments