Mark Identification

EVOLUTION

Serial Number

75549671

Filing Date

Sep 8, 1998

Registration Date

Apr 18, 2000

Trademark by

STEAG AST ELEKTRONIK GMBH

Classification Information

Machines for manufacturing semiconductor substrates, namely, machines for heating or annealing semiconductor substrates via rapid thermal processing, machines for cleaning semiconductor substrates , and machines for depositing layers of material onto semiconductor substrates

Machinery