ESIOPENSHORT

Computer programs for detecting defects in the image pattern and design layout pattern of electronic circuits by optical, electron beam microscopes or scanning electron microscopes; computer programs and computer software for detecting defects in the image pattern and design layout pattern of electronic circuits by optical, electron beam microscopes or scanning electron microscopes; data processing programs for detecting defects in the image pattern and design layout pattern of electronic circuits by optical, electron beam microscopes or scanning electron microscopes