79109901
Oct 8, 2011
Jan 15, 2013
Software, recorded programs and control programs for the control of electron beam lithography [ and photo lithography ] installations for the manufacture of semiconductors, integrated circuits and for nanotechnology
Electrical and Scientific Apparatus[ Development of software and control programs for the control of electron beam lithography and photo lithography installations for the manufacture of semiconductors, integrated circuits and for nanotechnology ]
Computer and Scientific