EPIREVO

Apparatus for depositing on semiconductor wafers; apparatus for performing epitaxial growth on semiconductor wafers; apparatus for forming compound semiconductor films on semiconductor wafers; Metal Organic Chemical Vapor Deposition (MOCVD) apparatus for use in research, development and production; Chemical Vapor Deposition (CVD) apparatus for use in research, development and production; dry etching machines; semiconductor manufacturing apparatus; apparatus and devices used for the aforesaid apparatus, namely, reduced pressure control apparatus, temperature control apparatus, rotation control apparatus, other control apparatus, gas supply apparatus, exhaust gas treatment apparatus, wafer carrier devices, wafer carrier robots, wafer cleaning apparatus, temperature measuring devices, wafer curvature measuring apparatus; parts, accessories and pipes for the aforesaid goods

Repair, maintenance and installation of the following goods: apparatus for depositing on semiconductor wafers, apparatus for performing epitaxial growth on semiconductor wafers, apparatus for forming compound semiconductor films on semiconductor wafers, Metal Organic Chemical Vapor Deposition (MOCVD) apparatus, Chemical Vapor Deposition (CVD) apparatus, etching apparatus, semiconductor manufacturing apparatus and parts, accessories and pipes therefor; repair, maintenance and installation of apparatus and devices used for semiconductor manufacturing apparatus, namely, reduced pressure control apparatus, temperature control apparatus, rotation control apparatus, other control apparatus, gas supply apparatus and their parts, exhaust gas treatment apparatus and their parts, wafer carrier devices, wafer carrier robots, wafer cleaning apparatus, temperature measuring devices, wafer curvature measuring apparatus and parts, accessories and pipes for the aforesaid apparatus and devices; providing information in the fields of repair, maintenance and installation of the aforesaid apparatus and devices, their parts, accessories and pipes