76054112
May 23, 2000
Oct 23, 2001
GAS CLUSTER ION BEAM PROCESSING AND SURFACE FILM DEPOSITION MACHINES, NAMELY FOR COATING, CLEANING, ETCHING OR SMOOTHING SUBSTRATE SURFACES OR OTHER SURFACES
MachineryTREATMENT OF SURFACES, NAMELY COATING, CLEANING, ETCHING, SMOOTHING AND ION IMPLANTING VIA PHYSICAL VAPOR DEPOSITION AND ION BEAM PROCESSES
Treatment of MaterialsSCIENTIFIC RESEARCH, NAMELY CONTRACT RESEARCH AND DEVELOPMENT SERVICES IN THE FIELD OF SUBSTRATE SURFACES
Computer and Scientific