EPICYCLON

Chemical vapor deposition system for use in the manufacture of semiconductors, namely, an electrothermic apparatus that produces coating by reacting vapor-phase chemicals; physical vapor deposition system for use in the manufacture of semiconductors, namely, an electrothermic apparatus that produces coating by vaporizing coating materials; rapid thermal processing system for use in the manufacture of semiconductors, namely, an electrothermic apparatus that subjects an item under treatment to rapidly varying thermal conditions; fittings and parts to be used in conjunction with the listed apparatus; semiconductors produced, coated, processed, or treated by the listed apparatus