79037939
Dec 20, 2006
May 27, 2008
Optical sensors for monitoring and controlling the layer growth during the manufacture of optoelectronic components, namely, light emitting diodes, laser diodes, photo diodes, transistors, integrated circuits, solar cells and semiconductors; devices and plants for measuring physical parameters during the manufacture of optoelectronic components, namely, optical sensors for measuring substrate bowing, growth rate, surface morphology, optical constants, temperature, reflectance, rotation speed and film composition; computer software for measuring, monitoring and controlling the manufacture of optoelectronic components
Electrical and Scientific Apparatus