ENVIRONMENTAL SOLUTION

Pneumatic or hydraulic machines and instruments, namely, pumps, vacuum pumps, blowers and compressors; machines for polishing the surface of semiconductor wafers; plating machines used for preparation of semiconductors; machines for washing semiconductor wafers; precise dampers for controlling vibrations and protecting high precision instrumentation

Telemetering and remote control apparatus and instruments for pump units, namely, a central control unit connected to each dry vacuum pump and turbo molecular pump via a local area computer network designed to enable the monitoring of pump operations; telemetering and remote control apparatus and instruments for vacuum apparatus, namely, a central control unit connected to each dry vacuum pump and turbo molecular pump via a local area computer network designed to enable the monitoring of pump operations; remote control telemetering machines and instruments, namely, remote control machines and instruments and remote telemetering machines and instruments; apparatus for detecting ammonia gas, namely, a tape that changes color according to the concentration of ammonia gas in the air; electric soldering irons; ozonizer for generating ozone by subjecting a gas to high frequency, high voltage discharge; electric demineralizers for water for washing precise components or liquid crystals or to be used in the semiconductor industry, for boiled water to be used in thermal power station or nuclear plant, or for raw water for pharmaceuticals; machines for treating exhaust gas in semiconductor and liquid crystal manufacturing

Apparatus for treating exhaust gas in semiconductor and liquid crystal manufacturing, namely, gas scrubbers and gas decomposition machines; apparatus for preparing ozonized water, namely, ozonized water generator; apparatus for preparing purified water, namely, ultrapure water producing system; ventilating system filters for removing trace amounts of gas for use in an atmosphere such as a clean room of a semi-conductor manufacturing factory; polycarbonate container for protecting semiconductor wafers from contamination with purifying air; apparatus for condensing waste water, namely, vacuum evaporator with heat pump system