76363082
Jan 25, 2002
Mar 16, 2004
Active Trademark
Semiconductor wafer processing [equipment]; namely, [ epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors,] plasma etchers[, ion implanters, electronic measuring and monitoring apparatus, and wafer polishing apparatus; all ] for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
Electrical and Scientific Apparatus