73611722
Jul 28, 1986
Nov 17, 1987
SYSTEMS FOR PRODUCING COMPOUND SEMI-CONDUCTOR MATERIALS, COMPRISING MOCVD EPITAXIAL DEPOSITION AND GROWTH CHAMBERS, GAS HANDLERS, GAS PURIFIERS, TEMPERATURE CONTROLLERS, EXHAUST CANISTERS AND FILTERS
MachineryCUSTOM MANUFACTURE OF EPITAXIAL WAFERS, CRYSTAL GROWTH APPARATUS AND GAS HANDLING APPARATUS
Building Construction and Repair