74611277
Dec 15, 1994
Jul 2, 1996
apparatus, instruments and machines for use in the manufacture of semi-conductors and semi-conductor wafers, namely etching machines, chemical vapor deposition machines and sputtering machines for depositing metal on a substrate
Machinerycomputer software for control of semiconductor fabrication machines, chemical deposition machines, sputtering machines and evaporation and vacuum processing machines
Electrical and Scientific Apparatus