78175954
Oct 18, 2002
SEMICONDUCTOR MANUFACTURING MACHINES; SEMICONDUCTOR SUBSTRATE MANUFACTURING MACHINES; SEMICONDUCTOR WAFER PROCESSING MACHINES; AND PARTS, FITTINGS AND DEVICES ASSOCIATED WITH THE FOREGOING
MachineryCOMPUTER HARDWARE; COMPUTER SOFTWARE FOR USE IN THE MANAGING AND CONTROLLING OF THE MANUFACTURE OF SEMICONDUCTORS; SEMICONDUCTORS; SEMICONDUCTOR CHIPS, DEVICES AND COMPONENTS
Electrical and Scientific Apparatus