Mark Identification

EFD

Serial Number

76025683

Filing Date

Apr 14, 2000

Registration Date

Oct 8, 2002

Trademark by

THERMA-WAVE INC.

Classification Information

SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, NAMELY A UNIT FOR REMOVING A CONTAMINATION LAYER ON A SEMICONDUCTOR WAFER TO IMPROVE MEASUREMENT OF THE WAFER

Electrical and Scientific Apparatus