76363365
Jan 24, 2002
Mar 2, 2004
Machines and parts thereof for vacuum coating of particularly flat substrates consisting of organic and/or inorganic materials, by means of chemical vapor deposition (CVD) and/or physical vapor deposition (PVD), comprising one and/or more layers of metallic and/or non-metallic layers or of alloys and/or compositions thereof, in a continuous and/or discontinuous operating method
Machinery