EART

Vacuum pumps; turbomolecular pumps; compound molecular pumps being turbomolecular pumps; semiconductor manufacturing machines and structural systems thereof; vacuum exhaust systems for exhausting gas in vacuum chambers, all for use with semiconductor manufacturing machines and structural systems thereof; structural parts and fittings for all the aforesaid goods

Electron microscopes; mass spectrometers; surface analyzers; residual gas analyzers; laboratory apparatus and instruments using vacuums, namely, controllers for vacuum pumps, ionization vacuum gauges, vacuum gauges, convection gauges, pirani gauges, penning gauges, ion gauges, magnetron vacuum gauges, inverted magnetron vacuum gauges, wide range gauges, and thermocouple vacuum gauges

Repair or maintenance of semiconductor processing equipment, exhaust gas management systems * for semi-conductors processing, * except computer software, vacuum apparatus and vacuum pumps and parts and fittings therefor; repair or maintenance of semiconductor manufacturing machines and systems, except computer software; repair or maintenance of electron microscopes; repair or maintenance of mass spectrometers, surface analyzers and residual gas analyzers; repair or maintenance of analyzers using vacuums *, namely, ionization gauges, vacuum gauges, convection gauges, pirani gauges, penning gauges, ion gauges, magnetron gauges, inverted magnetron gauges, wide range gauges, thermocouple gauges * ; repair or maintenance of laboratory apparatus and instruments using vacuums