E

[ ELECTRONIC SCIENTIFIC LABORATORY APPARATUS-NAMELY, DIFFUSION FURNACES AND FURNCE CONTROLLERS, ] AUTOMATIC AND MOTORIZED WAFER PROBERS AND COMPONENTS THEREOF, FIXED MICROPOSITIONING PROBES, PROBE RINGS, AIR-OPERATED RETRACTABLE PROBES AND X-Y ROTATION VACUUM STAGES, OPTICAL MASK ALIGNMENT SYSTEMS, INTERFEROMETERS, [ DIFFUSION ACCESSORIES, INCLUDING DILUTION DOPING SYSTEMS, OXIDE SYSTEMS, QUARTZ DIFFUSION BOATS, SOURCE BOATS AND FURNACE TUBES, ] SPLIT FIELD MICROSCOPE AND EXPOSURE SYSTEMS, MICROSCOPE ILLUMINATORS, [ WAFER PROCESSING EQUIPMENT AND ] STEPPING MOTOR CONTROL SYSTEMS