76406820
May 2, 2002
Sep 16, 2003
SEMICONDUCTOR WATER PROCESSING EQUIPMENT, NAMELY, THERMAL TREATMENT REACTORS; CHEMICAL VAPOR DEPOSITION REACTORS, ALSO OPERATING WITH ELECTRIC GAS-DISCHARGE; ELECTRONICALLY CONTROLLED SEMICONDUCTOR PROCESSING MACHINES FOR THE MANUFACTURE OF SEMICONDUCTORS AND FOR THE DEPOSITION OF THIN FILMS; REPLACEMENT PARTS FOR AFORESAID PRODUCTS
Machinery