DFC
Mark Identification

DFC

Serial Number

78546947

Filing Date

Jan 13, 2005

Trademark by

LAM RESEARCH CORPORATION

Classification Information

Components of equipment for the manufacture, processing, and fabrication of semiconductors, in the nature of plasma processing chambers, plasma reactors, plasma generators, radio-frequency generators, gas distribution hardware, vacuum pumps, valves, mass flow controllers, temperature controls, bias adjustment controls, monitoring sensors, operating pressure controls, confinement rings, confinement ring actuators

Machinery