DEPFAB

Vapor deposition machines for use in manufacturing semiconductors; plasma deposition and thermal growth machines for use in manufacturing semiconductors; apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools; flexible plasma processing apparatus for plasma etching and plasma deposition

Apparatus and instruments for plasma deposition for manufacturing and processing semiconductors for plasma deposition and thermal growth for manufacturing and processing semiconductors; apparatus and instruments for manufacturing, processing and plasma treatment of semiconductor wafers, plastics or other materials; plasma cluster tools, all being laboratory apparatus and instruments; laboratory apparatus and instruments for plasma research; computer hardware and downloadable software for for the purpose of the control and operation of vapor deposition machines, plasma deposition and thermal growth machines, apparatus and instruments for thin film processing namely, atomic layer deposition tools, chemical vapour deposition tools, etch tools and cluster tools and flexible plasma processing apparatus for plasma etching and plasma deposition; replacement parts for the aforesaid goods