76356632
Oct 18, 2001
Apr 29, 2003
Active Trademark
Machines used for the processing of materials and treatment of gases with microwave-inducted plasmas comprised of plasma generators, plasma sources, plasma circulators, process chambers, electric pumps, and substrate holders
MachineryScientific, electrical apparatus and instruments for the production and manipulation of gaseous plasmas and for radio-frequency engineering, namely, computer hardware, programmable logic controllers and control units, microwave generators, sensors, transmitters, receivers, automated tuners, mass flow controllers and gauges, and pressure controllers and gauges
Electrical and Scientific ApparatusConducting scientific and industrial research regarding production and application of gaseous plasmas
Computer and Scientific