85636907
May 29, 2012
Oct 21, 2014
Layer of piezoelectric ceramic material to which voltage is applied or from which voltage is sensed for use with an electric actuator, electric sensor, or electrical transducer, for use with accelerometers, gyroscopes, sensors, micro-mirrors, hard disk drives, and transistors, and not for use with batteries, fuel cells, or for the storage of voltage
Electrical and Scientific Apparatus