CRUSTBUSTER

Mechanical apparatus and components therefor as well as equipment comprised thereof for the manufacture and treatment of substrates, namely semiconductor substrates, silicon disks, wafers and photomasks; fully automatic equipment and components therefor for cleaning, coating, exposing to UV light, developing, etching and stripping substrates, namely semiconductor substrates, silicon disks, wafer, imprint templates and photomasks; semiautomatic equipment (manual insertion and removal) and components for cleaning, coating, exposing to UV light, developing, etching and stripping namely semiconductor substrates, silicon disks, wafers, imprint templates and photomasks.