75464181
Apr 2, 1998
Apr 11, 2000
Semiconductor devices having mechanical and electrical properties, namely, transducers, gears, rotors, valves, switches, actuators, accelerometers, gyroscopes, mirrors, and rotational and translational motors
Electrical and Scientific ApparatusSemiconductor device fabrication services for others, namely, development, layout, interconnection and packaging
Computer and Scientific