75215002
Dec 18, 1996
semiconductor wafer processing equipment and components, namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanter, supporting frames therefor, chemical mechanical polishers, and parts thereof; and computer operating programs for use therewith
Electrical and Scientific Apparatusrepair and maintenance services for semiconductor wafer processing equipment, and components
Building Construction and Repair