79404432
Jul 4, 2024
Software and framework for aggregating and combining measurement parameters of semiconductor wafers in the production of semiconductor devices; software for analysing and interpreting in-situ and in-line measurement parameters before, during and after thin film deposition, thin film etching and other treatment and characterisation steps; software for improving the yield and the stability of production processes and their analysis results for statistical process control in the production of semiconductor devices.
Electrical and Scientific Apparatus