75682362
Apr 14, 1999
Aug 7, 2001
CHEMICAL VAPOR DEPOSITION EQUIPMENT, NAMELY, VAPORIZATION CHAMBERS AND CHEMICAL VAPORIZERS; CHEMICAL VAPOR DELIVERY CONDUITS; DEPOSITION CHAMBERS INCLUDING SEMICONDUCTOR PROCESSING CHAMBERS; ELECTRONIC CONTROLLERS FOR CONTROLLING CHEMICAL VAPOR DEPOSITION; SENSORS, HEATERS, VALVES, AND OTHER FLOW REGULATORS ASSOCIATED WITH THE AFORESAID GOODS; AND PARTS FOR ALL OF THE AFORESAID GOODS
Electrical and Scientific Apparatus