74271282
May 1, 1992
Jan 19, 1993
superconducting materials; namely, thin films of metals of metal cuprates on substrates and superconducting electronic circuits systems, subsystems, and devices; namely, superconducting quantum interference devices, bolometers, radio frequency filters, resonators, cavities, transmission lines, multi-chip modules, analog signal processors and digital signal processors, apparatus for fabricating thin film superconductors; namely, systems including chambers for depositing thin superconducting films by means of laser ablation or sputtering and instruments for use in fabricating or testing superconductors; namely, substrate heaters, target holders, and mutual inductance testers
Electrical and Scientific Apparatus