74011840
Dec 18, 1989
Dec 22, 1992
SUPERCONDUCTING MATERIALS; NAMELY, THIN FILMS OF METALS OR METAL CUPRATES ON SUBSTRATES AND SUPERCONDUCTING ELECTRONIC CIRCUITS; AND SUPERCONDUCTING DEVICES; NAMELY, SUPERCONDUCTING QUANTUM INTERFERENCE DEVICES, BOLOMETERS, RAPID FREQUENCY FILTERS, RESONATORS, CAVITIES, TRANSMISSION LINES, MULTI-CHIP MODULES, ANALOG SIGNAL PROCESSORS AND DIGITAL SIGNAL PROCESSORS; APPARATUS FOR FABRICATING THIN FILM SEMICONDUCTORS; NAMELY, SYSTEMS COMPRISING CHAMBERS FOR DEPOSITING THIN SUPERCONDUCTING FILMS BY MEANS OF LASER ABLATION OR SPUTTERING; AND INSTRUMENTS FOR USE IN FABRICATING OR TESTING SUPERCONDUCTORS; NAMELY, SUBSTRATE HEATERS, TARGET HOLDERS, AND MUTUAL INDUCTANCE TESTERS
Electrical and Scientific Apparatus