76374157
Feb 25, 2002
Jul 19, 2005
MACHINE PARTS FOR MACHINES THAT PLANARIZE OR PATTERN DIELECTRICS OR ORGANIC POLYMERS IN THE MICROELECTRONIC, OPTO-ELECTRONIC, AND MICROELECTRICAL-MECHANICAL SYSTEMS INDUSTRIES, namely, OPTICAL FLATS, PATTERNED OBJECTS OR MOLDS, EVACUATION CHAMBERS, PRESSES, [ ETCHERS AND ROBOTS ]
Machinery