76262387
May 24, 2001
Jan 22, 2002
sensor chips, sensor systems, devices, and transmitters namely, relative humidity sensors, mass flow sensors, air flow sensors, gas flow sensors, differential pressure sensors, temperature sensors, liquid flow sensors, pressure sensors, gas sensors, and radiation sensors; industrial process control software
Electrical and Scientific Apparatusresearch and development of sensor chips, sensor devices, sensor systems, transmitters, and control systems for others
Computer and Scientific