75516807
Jul 10, 1998
Sep 12, 2000
cluster associated with an assembly line tools having automatic robot arms for conveying semi [ conduction ] * conductor * wafers and glass substrates, and for the manufacture of semi conductors and liquid crystal displays in a vacuum condition; robots for use in the manufacture of electronic circuits; machines and machine tools for manufacturing semi-conductors and integrated circuits, and robots for conveying and lifting
MachineryElectronic machines and instruments and parts and fittings therefor, namely, computer programs for use in the operation and control of the manufacture of semiconductors and liquid crystal displays in a vacuum condition, pre-recorded electronic circuits, tapes, disks, and ROMS for the aforesaid computer programs
Electrical and Scientific Apparatus