CIRCL-FOCUS

Computer hardware; computer hardware, namely, computer equipment for use in process control and yield management for the semiconductor, integrated circuit and related microelectronics manufacturing industries, for testing and inspecting physical and electrical properties of semiconductors, integrated circuits and microelectronics, and computer equipment for providing analytic data on the performance of inspection and metrology tools; cluster tools, namely, electronic apparatus for semiconductor wafer shape metrology and wafer defect inspection