75510670
Jul 2, 1998
Apr 17, 2001
Active Trademark
Automated system comprising a reservoir containment cabinet, automatic electronic controller for controlling the transfer of chemicals, chemical process piping, automatic valves, pressure indicating gauges and electronic monitoring systems comprised of level sensors, signaling alarm for indicating a malfunction, indicator lights, pressure senors, and electronic process controllers for generating digital data, for delivering chemicals from a reservoir outside a confined space under controlled environmental conditions to a process tool contained in said confined space or room, for use in electronics fabrication industry
Electrical and Scientific Apparatus