76418013
Jun 7, 2002
Dec 23, 2003
Mechanical devices in the nature of manipulators, for handling or transport of semiconductor wafers
MachineryHardware and software used to operate systems and devices for thermal processing, namely, diffusion furnaces, continuous furnaces, burn in kilns, vacuum soldering furnaces, coating furnaces, annealing furnaces, enameling ovens, vacuum furnaces, plants for chemical vapor deposition
Electrical and Scientific ApparatusPlants and equipment for thermal processing or manufacturing methods, namely, diffusion furnaces, continuous furnaces, burn in kilns, vacuum soldering furnaces, coating furnaces, annealing furnaces, enameling furnaces, vacuum furnaces, plants for chemical vapor deposition (CVD-plants); systems for processing of semiconductor wafers in vacuum, namely diffusion furnaces, plants for chemical vapor deposition; systems for handling and cleaning of gases and exhaust gases, namely, gas purification plants
Environmental Control Apparatus