Mark Identification

CENTROTHERM INTERNATIONAL

Serial Number

76418013

Filing Date

Jun 7, 2002

Registration Date

Dec 23, 2003

Trademark by

CENTROTHERM ELEKTRISCHE ANLAGEN GMBH & CO. KG

Classification Information

Mechanical devices in the nature of manipulators, for handling or transport of semiconductor wafers

Machinery

Hardware and software used to operate systems and devices for thermal processing, namely, diffusion furnaces, continuous furnaces, burn in kilns, vacuum soldering furnaces, coating furnaces, annealing furnaces, enameling ovens, vacuum furnaces, plants for chemical vapor deposition

Electrical and Scientific Apparatus

Plants and equipment for thermal processing or manufacturing methods, namely, diffusion furnaces, continuous furnaces, burn in kilns, vacuum soldering furnaces, coating furnaces, annealing furnaces, enameling furnaces, vacuum furnaces, plants for chemical vapor deposition (CVD-plants); systems for processing of semiconductor wafers in vacuum, namely diffusion furnaces, plants for chemical vapor deposition; systems for handling and cleaning of gases and exhaust gases, namely, gas purification plants

Environmental Control Apparatus