73532756
Apr 18, 1985
May 27, 1986
OPTICAL-ELECTRICAL APPARATUS USED IN THE SEMICONDUCTOR INDUSTRY, NAMELY, WAFER STEPPERS, WHICH ARE AUTOMATIC STEP AND REPEAT MASK ALIGNMENT AND EXPOSURE SYSTEMS THAT ARE USED TO PRODUCE INTEGRATED CIRCUITS, UNASSEMBLED WAFER STEPPERS, AND REPLACEMENT PARTS FOR WAFER STEPPERS
Electrical and Scientific Apparatus