Computer hardware and software, sold as a unit, for instructing a high precision electronic apparatus to determine overlapping correction values by measuring the alignment marks on semiconductor wafers, and to transmit the correction values to semiconductor lithography apparatus to make the corrections; computer servers for operation of a high precision electronic apparatus for measuring semiconductor wafers for use in the semiconductor industry; computer hardware and software, sold as a unit, for controlling apparatus for measuring semiconductor wafers; computer servers; computer software for controlling semiconductor manufacturing machines and systems; computer software for controlling semiconductor lithography apparatus; computer software for use in processing semiconductor wafers; computer software for apparatus for measuring semiconductor wafers
Electrical and Scientific Apparatus