79358569
Sep 1, 2022
Machines for processing semiconductors, solar cells, fibers and other substrates; machines for etching semiconductor surfaces; machines for vapor deposition or coating of semiconductor surfaces, under vacuum [so-called CVD process] or atmospheric or under plasma influence; machines for conveyance [atmospheric or sub-atmospheric or under predefined gas atmosphere]; machines for atomic layer deposition [=ALD]; equipment and devices for thermal processing or manufacturing processes, namely, coating equipment, annealing equipment, vacuum soldering, chemical vapor deposition equipment [CVD equipment]
MachineryHardware and software for the operation of semiconductor manufacturing machines and heating installations
Electrical and Scientific ApparatusFiring furnaces; vacuum furnaces; laminating furnaces; apparatus for thermal, dry and wet-chemical waste gas or gas cleaning; industrial furnaces for thermal processing of semiconductors, solar cells, fibers and other substrates as well as their thermal processing under vacuum; industrial furnaces for thermal processing of surfaces and objects, namely, diffusion furnaces, conveyor belt furnaces, coating furnaces; equipment for the treatment and purification of gases and waste gases, namely, waste gas treatment equipment; equipment and devices for thermal processing or manufacturing processes, namely, diffusion furnaces, conveyor belt furnaces, firing furnaces; radiation-based rapid heating installations consisting of heating apparatus and heating plasma-based apparatus and their combination; industrial furnaces for thermal layer growth and thermal layer transformations
Environmental Control ApparatusConstruction, repair, installation and maintenance work relating to machinery and machine tools as well as their individual parts, as a whole, respectively for the manufacturing and processing of solar cells [turnkey solutions], semiconductors, fibers and raw materials therefor; services for the assembly of semiconductor devices, both atmospheric as well as sub-atmospheric
Building Construction and Repair