C3

Components of semiconductor manufacturing machines for removing residues and/or materials from semiconductor wafers and drying semiconductor wafers, namely, wet processing chambers, fluid dispensers, brushes, air blowers, pumps, valves, flow controllers, motion controllers, and monitoring sensors, all sold as integral parts of semiconductor manufacturing machines; Technology for removing residues and/or materials from semiconductor wafers and drying semiconductor wafers, comprising wet processing chambers, fluid dispensers, brushes, air blowers, pumps, valves, flow controllers, motion controllers, and monitoring sensors, all sold as an integral part of semiconductor manufacturing machines